Fabrication of large-volume microfluidic chamber embedded in glass using three-dimensional femtosecond laser micromachining |
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| Authors: | Yongfeng Ju Yang Liao Long Zhang Yinglong Sheng Qiang Zhang Danping Chen Ya Cheng Zhizhan Xu Koji Sugioka Katsumi Midorikawa |
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| Affiliation: | (1) State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai, 201800, China;(2) Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai, 201800, China;(3) Graduate School of the Chinese Academy of Sciences, Beijing, 100039, China;(4) Laser Technology Laboratory, RIKEN-Advanced Science Institute, Hirosawa 2-1, Wako Saitama, 351-0198, Japan; |
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| Abstract: | We report on fabrication of large-volume, square-shaped microfluidic chamber embedded in glass by scanning a tightly focused femtosecond laser beam inside a porous glass immersed in water. After the hollow structure is created in the porous glass substrate, the fabricated glass sample is post-annealed at 1,050°C during which it can be sintered into a compact glass. By the use of this technique, a 1 mm × 1 mm × 100 μm microchamber connected to four microfluidic channels is created inside the transparent glass substrate, showing that our technique allows for fabrication of not only thin channel structures with arbitrary lengths and configurations, but also hollow structures with infinitely large sizes. |
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