Characterization of stacked sol-gel films: Comparison of results derived from scanning electron microscopy, UV-vis spectroscopy and ellipsometric porosimetry期刊界 All Journals 搜尽天下杂志传播学术成果专业期刊搜索期刊信息化学术搜索

Characterization of stacked sol-gel films: Comparison of results derived from scanning electron microscopy, UV-vis spectroscopy and ellipsometric porosimetry

Authors:	Andreas BittnerAngelika Schmitt,Rainer JahnPeer Lö bmann

Affiliation:	^a Lehrstuhl für chemische Technologie der Materialsynthese, Universität Würzburg, Röntgenring 11, 97070 Würzburg, Germany ^b Fraunhofer-Institut für Silicatforschung, Neunerplatz 2, 97082 Würzburg, Germany

Abstract:	TiO₂/MgF₂ bi-layers were prepared by sol-gel processing in both stacking sequences. Films were characterized by scanning electron microscopy, UV-vis spectrometry, and ellipsometric porosimetry. The results obtained by the different methods are compared. The validity and limitations of the respective techniques are discussed with special focus on film porosity and the interface between the TiO₂ and MgF₂ material.

Keywords:	Sol-gel deposition Thin films Ellipsometric porosimetry Titanium dioxide Magnesium fluoride Scanning electron microscopy
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