微型电容式压力传感器的制作与测试

从应用开发MEMS产品的实用角度出发，介绍了利用硅一硅键合技术制作的微型电容式压力传感器，给出了详细的制作工艺及主要工艺步骤图。对微传感器所用的测试装置的组成、测试电路的工作过程进行了详细介绍和深入分析。最后对不同尺寸的微传感器器件进行了测试，并对测试结果进行具体分析。结果表明：该微传感器具有良好的线性工作范围、良好的稳定性和较高的灵敏度。

Fabrication and Testing of Capacitive Pressure Microsensor

Introduced the capacitive pressure microsensor produced by Si-Si bonding technology in terms of the practicality of MEMS products.The producing technology and major diagrams were given in detail.The components of the testing equipment and working process of the testing circuit were introduced and analyzed in detail.At last,some testing experiments were done for the produced capaticive pressure microsensors.The results show that the microsensor has excellent linearity,high sensitivity and relatively good stability.