| α-Fe2O3薄膜的制备、结构和气敏特性 |
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| 引用本文： | 严北平,彭军,柴常春. α-Fe2O3薄膜的制备、结构和气敏特性[J]. 电子与信息学报, 1995, 17(5): 506-511 |
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| 作者姓名： | 严北平 彭军 柴常春 |
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| 作者单位： | 西安电子科技大学微电子所 西安 710071 |
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| 摘 要： | 采用等离子增强化学气相淀积工艺(PECVD)制备出了Fe2O3薄膜。用X射线衍射(XRD)和扫描电子显微镜(SEM)分析了薄膜的结构、表面形貌和粒度。研究了薄膜对乙醇、液化石油气、煤气和氢气的敏感特性。结果表明所研制的薄膜对乙醇有较高灵敏度,其检测下限可达1ppm,而对液化石油气、煤气和氢气不太敏感,具有优良的选择性。
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| 关 键 词： | α-Fe2O3薄膜 气敏特性 气敏元件 |
| 收稿时间： | 1993-12-06 |
| 修稿时间： | 1994-05-24 |
PREPARATION,STRUCTURE AND GAS SENSING PROPERTIES OF Fe2O3 THIN FILMS |
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| Yan Beiping,Peng Jun,Chai Changckun. PREPARATION,STRUCTURE AND GAS SENSING PROPERTIES OF Fe2O3 THIN FILMS[J]. Journal of Electronics & Information Technology, 1995, 17(5): 506-511 |
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| Authors: | Yan Beiping Peng Jun Chai Changckun |
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| Affiliation: | Microelectronics Research Institute,Xidian University, Xi'an 710071 |
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| Abstract: | A method to deposit hematite (Fe2O3) thin films by plasma-enhanced chemical vapor deposition (PECVD) is introduced. The structure and particle-size of Fe2O5 thin film are analysed by X-ray diffraction and SEM, respectively. The gas sensitive properties of thin film to LPG, coal gas, hydrogen and ethanol are studied. The results show that films prepared in this way are highly sensitive to ethanol. However, it is not so sensitive to LPG, coal gas or hydrogen. Therefore the film is proved to have high selectivity. |
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