氧化锌单晶DFB半导体激光器的设计与分析

基于严格耦合波理论(RCWA)和介质平板波导理论,针对光通信中的1550 nm波长,设计了一种基于氧化锌(ZnO)单晶的分布反馈式(DFB)半导体激光器的光栅结构,分析了二维电场模式图以及激射波长线宽图,得到了光栅结构的变化对其单纵模传输的影响。仿真结果表明,当光栅的周期为489 nm,占空比为50%,光栅深度为400 nm时,全局电场能量达到了8.3×107 J,光谱线宽小于0.1 。该激光器具有很好的窄线宽输出以及波长选择特性。理论分析与仿真结果基本一致为后期进行该器件的制备提供了较好的参考。

Design and analysis of ZnO signal-crystal DFB laser diode

According to the rigorous coupled-wave theory(RCWA) and dielectric slab waveguide theory,the grating microstructure of a single crystal ZnO-based DFB laser diode in the 1550nm wavelength communication band was proposed.A two-dimensional electric field mode and wavelength linewidth were analyzed.The influence of the grating structure variation on the property of the single longitudinal mode transmission was obtained.Numerical simulation shows that the whole electric field energy reaches about 8.3×107 J when the spectral linewidth is smaller than 0.1 astron,the grating period is 489 nm,duty cycle is 50% and grating depth is 400 nm.This laser has a good wavelength selection property and narrow linewidth.The theoretical analysis conforms the numerical simulation well and it provides a good reference for the design and preparation of the device.