| 基于MEMS的一种微机械滤波器的分析 |
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| 引用本文： | 唐炜斌,徐利梅,黄大贵. 基于MEMS的一种微机械滤波器的分析[J]. 微纳电子技术, 2007, 44(4): 195-199 |
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| 作者姓名： | 唐炜斌 徐利梅 黄大贵 |
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| 作者单位： | 电子科技大学,机械电子工程学院,成都,610054 |
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| 摘 要： | 介绍了一种自由梁微机械滤波器的组成及工作原理,采用连续系统的方法来分析该微机械滤波器的谐振器,推导了其弯曲振动模态下的谐振频率公式——Euler-Bernoulli方程。然后根据MEMS材料的特性和微系统表面微加工原理设计了一种共振频率为70 MHz的微机械滤波器工艺,并利用MEMS专业软件Coventor进行仿真分析,仿真结果与计算结果一致,验证了该工艺设计的可行性。
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| 关 键 词： | 微机械滤波器 表面微加工 微机电系统工艺 共振 |
| 文章编号： | 1671-4776(2007)04-0195-05 |
| 修稿时间： | 2006-10-27 |
Simulation and Analysis of MEMS-Based Micromechanical Filter |
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| TANG Wei-bin,XU Li-mei,HUANG Da-gui. Simulation and Analysis of MEMS-Based Micromechanical Filter[J]. Micronanoelectronic Technology, 2007, 44(4): 195-199 |
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| Authors: | TANG Wei-bin XU Li-mei HUANG Da-gui |
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| Affiliation: | School of Mechatronics Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China |
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| Abstract: | A free-free beam micromechanical filter based on MEMS was described.The method of continuous system was applied to conduct the mechanical vibration frequency through the Euler-Bernoulli equation.The process of 70 MHz micromechanical filter was designed and simulated by coventorware.The simulation results validate the feasibility of the technology. |
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| Keywords: | micromechanical filter surface-micromachining technology MEMS technics resonance |
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