Mode selection for a piezoelectric layer in a bulk-acoustic-wave composite acoustic resonator |
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Authors: | G D Mansfel’d |
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Affiliation: | (1) Institute of Radio Engineering and Electronics, Russian Academy of Sciences, Russia |
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Abstract: | An analysis is made of the mode selection for a thin piezoelectric layer in a bulk-acoustic-wave composite layered acoustic
resonator by transformation of the impedance using a set of quarter-wave layers. Depending on the number of layers, the impedance
of the substrate on which the piezoelectric layer is deposited may be abruptly increased or sharply reduced. This serves to
simulate a “fixed” or “free” surface. As a result, a mechanically strong resonator structure is produced, operating at the
natural frequencies of a thin piezoelectric layer. A numerical simulation is made of multilayer structures formed by alternating
quarter-wave layers of LiNbO3 and LiTaO3. It is shown that if these layers are of micron thickness and there is a sufficiently large number of them, the acoustic
properties of the substrate do not influence the frequency characteristics and Q factor of the thin piezoelectric vibrating
layer in the microwave range.
Pis’ma Zh. Tekh. Fiz. 23, 35–41 (October 12, 1997) |
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Keywords: | |
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