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电子铝箔电解腐蚀隧道孔极限长度的控制机理
引用本文:魏玲玲,何业东.电子铝箔电解腐蚀隧道孔极限长度的控制机理[J].电子元件与材料,2008,27(11).
作者姓名:魏玲玲  何业东
作者单位:北京科技大学,北京市腐蚀、磨蚀与表面技术重点实验室,北京,100083
基金项目:北京地区高等学校新材料学科群建设资助项目
摘    要:通过测试电子铝箔在HCl-AlCl3中阳极极化曲线和电解腐蚀隧道孔的极限长度,发现了隧道孔的极限长度llim与铝箔的点蚀电位与自腐蚀电位的差值ΔE存在相关性,导出了隧道孔生长的动力学公式以及?E与llim的线性关系式,表明通过测试ΔE可以判断llim的变化趋势,为研究新型发孔液提供了一种简便的途径。

关 键 词:电子技术  电子铝箔  电解腐蚀  隧道孔  极限长度

Controlling mechanism of electroetched tunnel pit limiting length for electronic Al foil
WEI Ling-ling,HE Ye-dong.Controlling mechanism of electroetched tunnel pit limiting length for electronic Al foil[J].Electronic Components & Materials,2008,27(11).
Authors:WEI Ling-ling  HE Ye-dong
Affiliation:WEI Ling-ling,HE Ye-dong (Beijing Key Lab for Corrosion,Erosion , Surface Technology,Beijing University of Science , Technology,Beijing 100083,China)
Abstract:Both of the anodic polarization curves and the limiting lengths, llim of electro-etching tunnels of electronic Al foil electro-etched in the HCl-AlCl3 were measured. It was found that there was a correlation between the llim and the potential different value, ΔE, of pit corrosion potential and corrosion potential of Al foil. The dynamic equations on tunnel growth and the linear quantitative correlation between llim and ΔE were deduced. Therefore, the change tendency of llim is judged simply by measuring ΔE, which supplies a convenient way to study the new kind of tunnel-forming etchant.
Keywords:electron technology  electronic Al foil  electro-etch  tunnel pit  limiting length  
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