| Fe—N薄膜磁性能的研究 |
| |
| 引用本文： | 张振涛,成正维.Fe—N薄膜磁性能的研究[J].金属功能材料,1997,4(6):274-276. |
| |
| 作者姓名： | 张振涛 成正维 |
| |
| 作者单位： | [1]冶金部钢铁研究总院 [2]东北大学 |
| |
| 摘 要： | 本文研究了溅射气氛中氮含量及后续热处理对射频溅射法制备的Ｆｅ－Ｎ薄膜的磁性能的影响，电镜分析的结果显示，样品中含有少量Ｆｅ１６Ｎ２。
|
| 关 键 词： | 铁磁性 射频溅射 铁 氮 薄膜 |
Study on the Magnetic Properties of RF Sputerring Iron Nitrogen Thin Films |
| |
| Zhang Zhentao,Cheng Zhenwei,Jiang long,Hu Quanli,Zhong Tao,Song Jingxiao,Yang Weidong,Xianyu Ze.Study on the Magnetic Properties of RF Sputerring Iron Nitrogen Thin Films[J].Metallic Functional Materials,1997,4(6):274-276. |
| |
| Authors: | Zhang Zhentao Cheng Zhenwei Jiang long Hu Quanli Zhong Tao Song Jingxiao Yang Weidong Xianyu Ze |
| |
| Affiliation: | Zhang Zhentao * Cheng Zhenwei ** Jiang long * Hu Quanli ** Zhong Tao ** Song Jingxiao * Yang Weidong * Xianyu Ze ** |
| |
| Abstract: | The relationship between the magnetic properties of RF sputerring iron nitrogen thin films and the content of N 2 in sputerring gas is studied.The experiment of the effect of heat treatment on the properties of Fe N thin films was carried out.The results of EMS show that there is a little of Fe 16 N 2 in the films. |
| |
| Keywords: | magnetic properties Fe N thin film RF sputerrmg |
| 本文献已被 CNKI 维普 等数据库收录！ |
