| 基于状态空间法的MEMS静电驱动控制方案 |
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| 引用本文： | 于尚民,冯仁剑,万江文.基于状态空间法的MEMS静电驱动控制方案[J].微纳电子技术,2007(Z1). |
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| 作者姓名： | 于尚民 冯仁剑 万江文 |
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| 作者单位： | 北京邮电大学 北京100876(于尚民)，北京航空航天大学 北京100083(冯仁剑，万江文) |
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| 摘 要： | 采用状态空间分析法,研究MEMS静电驱动平行板结构的运动特性,实现了平行板机械子系统和静电子系统状态空间矩阵参数分离,制定了状态反馈控制方案以改善平行板系统的运动特性,在Simulink仿真平台上完成了控制方案的计算机仿真实验。结果表明,状态反馈控制方案能较好地提高系统的操作精度并改善瞬时特性。
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| 关 键 词： | MEMS静电驱动 平行板 运动特性 状态空间 状态反馈 |
A Control Scheme of Electrostatically Actuated MEMS Based on the State Space Method |
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| YU Shang-min,FENG Ren-jian,WAN Jiang-wen.A Control Scheme of Electrostatically Actuated MEMS Based on the State Space Method[J].Micronanoelectronic Technology,2007(Z1). |
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| Authors: | YU Shang-min FENG Ren-jian WAN Jiang-wen |
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| Affiliation: | YU Shang-min1,FENG Ren-jian2,WAN Jiang-wen2 |
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| Abstract: | The kinetic characteristic of the parallel plate structure in electrostatically actuated MEMS was analyzed by the state space method.The matrix parameters of the electrostatic and mechanism subsystems were separated.Then a state feedback scheme was designed to improve the kinetic characteristic and operating accuracy of parallel plate.The simulation result using the Simulink shows that the state feedback control scheme can improve the kinetic characteristic and operating accuracy of an eletrostatically actuated MEMS effectively. |
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| Keywords: | electrostatically actuated MEMS parallel plate kinetic characteristic state space state feedback |
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