基于复色共焦的透明材料厚度测量数据处理方法研究

为了解决精密光学透镜制造、玻璃容器生产等透明材料相关行业对厚度检测的需求，采用复色共焦法对透明材料厚度进行检测。介绍了共焦系统测量原理，提出了测量结构方案，构建了测量实验装置，并对实验装置进行了标定。利用线性回归法对实验数据进行处理：使用线性预测函数建模，根据实测数据确定模型中各个参数，并对误差进行补偿，完善了厚度模型。实验结果表明：共焦系统的测量范围达到15 mm，测量精度为±3 μm，从而证明该方法是一种高精度的在线非接触测量方法。

Research on Approaches to Processing of Measured Thickness Data of Transparent Material Based on Polychromatic Confocal Technology

In order to meet the requirement of measuring thickness of transparent materials for precision optical lens and glass container, etc., the polychromatic confocal method is used to measure the thickness of transparent material. The measuring principle of confocal system is introduced. A measuring structure scheme is proposed, and an experimental device is constructed and calibrated. The linear regression method is adopted to process the experimental data. The proposed method is to use linear prediction function to construct a mathematical model. The parameters in the model are determined using the measured data. The thickness model is improved by compensating error. The experimental results show that the measuring range of confocal system can reach 15 mm, and the accuracy of measurement is ±3 μm. The compound color confocal method is a kind of online non-contact measurement technique with high precision.