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Visualization and numerical simulation of fine particle transport in a low-pressure parallel plate chemical vapor deposition reactor |
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| Authors: | Heru SetyawanManabu Shimada Kenji OhtsukaKikuo Okuyama |
| Affiliation: | Department of Chemical Engineering, Graduate School of Engineering, Hiroshima University, 1-4-1 Kagamiyama, Higashi-Hiroshima 739-8527, Japan |
| Abstract: | |
| Keywords: | CVD reactor Particle contamination Reduced pressure Light scattering Numerical simulation Dynamic behavior |
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