| LaAlO3/BaTiO3/SrTiO3三色超晶格的RHEED原位监测 |
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| 引用本文： | 秦文峰,熊杰,朱俊,唐金龙,张鹰,罗文博,李言荣.LaAlO3/BaTiO3/SrTiO3三色超晶格的RHEED原位监测[J].真空科学与技术学报,2006,26(6):508-511. |
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| 作者姓名： | 秦文峰 熊杰 朱俊 唐金龙 张鹰 罗文博 李言荣 |
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| 作者单位： | 电子科技大学微电子与固体电子学院,成都,610054 |
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| 摘 要： | 采用激光脉冲分子束外延技术，在（100）取向的STO单晶基片上成功外延生长了LaAlO3／BaTiO3／SrTiO3超晶格。在超晶格薄膜生长过程中采用反射高能电子衍射（RHEED）对LaAlO3／BaTiO3／SrTiO3超晶格的生长过程进行了分析。通过对超晶格中各层RHEED图像分析，发现由于各层面内晶格失配的不同，超晶格各层生长特性有所区别。借助原子力显微镜（AFM）对超晶格表面形貌进行了表征，表明制备的超晶格具有原子级平整的表面。
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| 关 键 词： | 薄膜 LAO/BTO/STO三色超晶格 反射高能电子衍射 |
| 文章编号： | 1672-7126（2006）06-0508-04 |
| 收稿时间： | 2006-02-26 |
| 修稿时间： | 2006年2月26日 |
In Situ RHEED Monitored Growth of Epitaxial LaAlO3/BaTiO3/SrTiO3 Tricolor Superlattices by Laser Molecular Beam Epitaxy |
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| Qin Wenfeng,Xiong Jie,Zhu Jun,Tang Jinlong,Zhang Ying,Luo Wenbo,Li Yanrong.In Situ RHEED Monitored Growth of Epitaxial LaAlO3/BaTiO3/SrTiO3 Tricolor Superlattices by Laser Molecular Beam Epitaxy[J].JOurnal of Vacuum Science and Technology,2006,26(6):508-511. |
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| Authors: | Qin Wenfeng Xiong Jie Zhu Jun Tang Jinlong Zhang Ying Luo Wenbo Li Yanrong |
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| Affiliation: | School of Microelectronics and Solid-State Electronics ,. University of Electronics Science and Technology of China, Chengdu 610054, China |
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| Abstract: | LaAlO_3/BaTiO_3/SrTiO_3 tricolor superlattices were successfully grown on(100) SrTiO_3(STO) substrates by laser molecular beam epitaxy.The growth was monitored in-situ by reflection high-energy electron diffraction(RHEED).Streak patterns indicate that(100) epitaxial growth proceeded up to the top layer of the superlattices.However,their growth behavior was somewhat different due to strain effects.The atomic force microscopy(AFM) images show that atomically flat surfaces were preserved during deposition. |
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| Keywords: | Thin films LaAlO3/BaTiO3/SrTiO3 tricolor superlattices Reflection high-energy electron diffraction |
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