A bi-material microcantilever temperature sensor based on optical readout |
| |
Authors: | Lin Wu Teng Cheng Qing-Chuan Zhang |
| |
Affiliation: | Key Laboratory of Mechanical Behavior and Design of Material of Chinese Academy of Sciences, University of Science and Technology of China, Hefei 230027, People’s Republic of China |
| |
Abstract: | As one of the simplest MEMS sensors, microcantilever can sense temperature faster and more sensitively than traditional thermometers as its small size and low thermal mass. In this paper, an Au/SiNx bi-material microcantilever temperature sensor based on optical readout is presented. The deflection of the cantilever varies with the change of temperature due to the differences in thermal expansion coefficients between gold and silicon nitride. Then, the temperature could be accurately measured by detecting the deflection of the cantilever with optical lever method. By experiments, the theoretical model is verified and the temperature characteristics of the sensor are also determined. With a commercial microcantilever, the temperature resolution of the sensor is tested to be 0.02 K when 25 mm length of optical arm set. By optimizing the microcantilever parameters, the temperature resolution of the sensor could be 0.1 mK. High sensitivity makes it suitable for some special precise temperature measurements. |
| |
Keywords: | MEMS Microcantilever Temperature sensor Bi-material Optical lever Temperature resolution |
本文献已被 ScienceDirect 等数据库收录! |