高能离子源清洗对AlCrN刀具涂层结构及性能的影响

采用自主研发的离子源增强多弧离子镀设备，研究涂层沉积前不同清洗工艺对基材表面粗糙度以及所制备的AlCrN涂层的表面形貌、硬度、膜基结合力、摩擦磨损和切削性能的影响。研究结果表明，高能Ar⁺清洗可以更有效清洁基材表面。与传统弧源清洗技术相比，经高能离子源清洗后的基体表面粗糙度降低，沉积态涂层的表面粗糙度更低。相比于传统弧源清洗工艺，高能Ar⁺清洗可以显著提高膜基结合强度，达到48.7 N，摩擦因数和磨损率均降低，涂层刀具寿命提高了3倍。

Effects of High-energy Ion Source Cleaning Technology on the Microstructure and Mechanical Properties of AlCrN Coatings

Ion source enhanced cleaning technology has been used before coating deposition due to its significant contribution to improve the properties of coatings. High-energy Ar⁺ ion cleaning source is used. The surface roughness of the substrates is characterized after utilizing various ion cleaning conditions before deposition. The microstructure, surface morphology, hardness, adhesion strength, friction and wear properties of the AlCrN coatings deposite on each ion-cleaned surface are systematically investigated. The results show that these high-energy Ar⁺ ions more effectively clean the surface of the workpieces with low bias voltage and significantly improve the adhesion strength of the coatings up to 48.7 N, which is much higher than that of the coatings fabricated through traditional cleaning techniques, and the wear and friction coefficient also decreases. In addition, after high-energy Ar⁺ ions, the coated tool life is also increased by 3 times in high-speed cutting tests.