| BST/BZT/BST多层薄膜结构与性能研究 |
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| 引用本文： | 秦文峰,熊杰,李言荣.BST/BZT/BST多层薄膜结构与性能研究[J].无机材料学报,2010,25(3):247-250. |
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| 作者姓名： | 秦文峰 熊杰 李言荣 |
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| 作者单位： | 1. 中国民航飞行学院 航空工程学院, 广汉 618307; 2. 电子薄膜与集成器件国家重点实验室, 电子科技大学, 成都 610054 |
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| 摘 要： | 利用脉冲激光沉积法在LaNiO3/LaAlO3(001)基片上生长了Ba0.6Sr0.4TiO3(BST)和Ba(Zr0.2Ti0.8)O3(BZT)单层薄膜,以及Ba(Zr0.2Ti0.8)O3/Ba0.6Sr0.4TiO3/Ba(Zr0.2Ti0.8)O3(BZT/BST/BZT)多层薄膜.X射线衍射(XRD)分析发现,BST、BZT和LNO薄膜都具有高度的(00l)取向.原子力显微镜(AFM)显示三种样品表面光滑无裂纹,晶粒尺寸和表面粗糙度相当.电容测试表明,相对BST、BZT单层薄膜,多层薄膜具有最大的品质因数42.07.表明多层薄膜在微波应用中具有很大的潜力.
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| 关 键 词： | BST/BZT/BST 薄膜 介电常数 漏电流 |
| 收稿时间： | 2009-04-30 |
| 修稿时间： | 2009-09-11 |
Structure and Properties of BST/BZT/BST Multilayer Film |
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| QIN Wen-Feng,XIONG Jie,LI Yan-Rong.Structure and Properties of BST/BZT/BST Multilayer Film[J].Journal of Inorganic Materials,2010,25(3):247-250. |
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| Authors: | QIN Wen-Feng XIONG Jie LI Yan-Rong |
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| Affiliation: | 1. Aviation Engineering Institute, Civil Aviation Flight University of China, Guanghan 618307, China; 2. State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronics Science and Technology of China, Chengdu 610054, China |
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| Abstract: | Ba0.6Sr0.4TiO3(BST) thin film,Ba(Zr0.2Ti0.8)O3(BZT)thin film and Ba0.6Sr0.4TiO3/Ba(Zr0.2Ti0.8)O3/Ba0.6Sr0.4TiO3(BST/BZT/BST) multilayer thin film were prepared by pulsed laser deposition(PLD) on the LaNiO3(LNO) coated LaAlO3(LAO) substrate.All the three kinds of films were characterized by XRD and atomic force microscope(AFM).XRD tests reveal that high-quality -oriented films are obtained.AFM results show that the grain size and root mean square(RMS) roughness of BST/BZT/BST sandwich film are similar to tha... |
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| Keywords: | BST/BZT/BST film thin films dielectric constant leakage current characteristics |
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