The effect of surface roughness on the vibration behavior of AFM piezoelectric MC in the vicinity of sample surface in air environment based on MCS theory |
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| Affiliation: | 1. Institute of Semiconductor Technology (IHT), TU Braunschweig, Hans-Sommer-Straße 66, Braunschweig D-38106, Germany;2. Laboratory for Emerging Nanometrology (LENA), Hans-Sommer-Straße 66, Braunschweig D-38106, Germany;3. Department 5.1 Surface Metrology, Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, Braunschweig D-38116, Germany;1. Department of Chemical Science and Technologies, University “Tor Vergata”, Rome, Italy;2. Department of Biology, University “Tor Vergata”, Rome, Italy;3. CNR-IRSA, Brugherio (MB), Italy;4. Department of Electronics Engineering, University of Rome Tor Vergata, Rome, Italy;1. School of Electrical Engineering and Automation, Hefei University of Technology, Hefei, 230009, PR China;2. School of Materials Science and Engineering, Hefei University of Technology, Hefei, 230009, PR China;1. Department of Mechanical and Aerospace Engineering, Science and Research Branch, Islamic Azad University, Tehran, Iran;2. Robotic Research Laboratory, School of Mechanical Engineering, Iran University of Science and Technology, Narmak, Tehran, Iran;1. School of Microelectronics, Shandong University, Jinan, 250100, China;2. National Key Laboratory of Application Specific Integrated Circuit (ASIC), Hebei Semiconductor Research Institute, Shijiazhuang, 050051, China;3. Microsystem and Terahertz Research Center, China Academy of Engineering Physics, Chengdu, 610200, China;4. Key Laboratory of Pulsed Power, Institute of Fluid Physics, CAEP, Mianyang, 621999, China |
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| Abstract: | Recent developments in the field of piezoelectric materials have led to the increasing use of piezoelectric materials in a variety of Atomic Force Microscopy (AFM). Utilizing piezoelectric layer as a sensor and actuator not only reduces the size of microscope but also enhances the quality of surface topography in Micro and Nano scales. In the current study, the effect of surface roughnesson the vibration behavior of AFM piezoelectric micro cantilever (MC) has been investigated in Micro and Nano scales according to the types of the surface roughness. Furthermore, the micro cantilever modelling has been schemed based on the Modified Couple Stress (MCS) theoryin order to model the vibration amplitude of AFM piezoelectric MC that precisely indicates the measured surface roughness. Besides, according to the various modelling of surface roughness, the effect of roughness radius on the minimum and maximum amplitude of Piezoelectric MC has been studied based on the geometry of roughness in air environment. In this environment, the effect of environmental forces including van der Waals, Capillary and contact forces on the vibration amplitude of MC forms the basis of surface topography which has, also, been studied in this article. Moreover, the present study intends to investigate the effect of surface roughness on the vibrating amplitude of MC in both the Tapping and Non-Contact Modes. |
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| Keywords: | AFM Amplitude mode Sample surface topography Surface roughness Piezoelectricmicro cantilever |
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