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Micro electrical discharge machining using high electric resistance electrodes
Affiliation:1. Institute of Science and Engineering, Kanazawa University, Kakuma-machi, Kanazawa, 920-1192, Japan;2. Graduate school of National Science and Engineering, Kanazawa University, Kakuma-machi, Kanazawa, 920-1192, Japan;1. College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, 210016, China;2. Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing, 210016, China;1. inspire AG, Leonhardstrasse 21, LEE L205, Zurich 8092, Switzerland;2. GF Machining Solutions, Losone 6616, Switzerland;3. Institute of Machine Tools and Manufacture, ETH Zurich, Zurich 8092, Switzerland;1. Key Laboratory of High Efficiency and Clean Mechanical Manufacture (Ministry of Education), School of Mechanical Engineering, Shandong University, Jinan, China;2. School of Art and Design, Chuzhou University, Chuzhou, China;1. Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Department of Mechanical Engineering, Tsinghua University, Beijing, 100084, China;2. State Key Laboratory of Tribology, Tsinghua University, Beijing, 100084, China;3. School of Instrumentation Science and Opto-Electronics Engineering, Beijing Information Science & Technology University, Beijing, 100192, China
Abstract:In micro electrical discharge machining (EDM), because the material removal per single pulse discharge mainly determines the minimum machinable size of a micro EDM, decreasing the material removal per single pulse discharge is important. In this study, in order to decrease the material removal per single pulse discharge, high electric resistance materials such as single-crystal silicon are used for electrodes. Analytical results show that when the electrode resistance increases, the peak value of the discharge current decreases, whereas the pulse duration increases. In addition, the discharge energy decreases when increasing the resistance. Silicon is used as a tool electrode, and the effect of resistivity of the silicon tool electrode on the diameter of discharge craters generated on the stainless steel workpiece is examined. Experimental results reveal that with increasing silicon electrode resistivity, the diameter of discharge craters decreases. Because the diameter of discharge craters can be decreased to 0.5 μm, improved finished surfaces of Rz 0.03 μm are obtained.
Keywords:Electrical discharge machining  Miniaturization  High electric resistance materials  Discharge crater  Surface roughness
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