Design and experimental validation of an ultra-precision Abbe-compliant linear encoder-based position measurement system |
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| Affiliation: | 1. SIMTech-NTU Joint Lab on Precision Engineering, School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore;2. SIMTech-NTU Joint Lab on Precision Engineering, Singapore Institute of Manufacturing Technology, A*STAR, Singapore;1. State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China;2. School of Material Science and Engineering, Nanchang Hangkong University, Nanchang 330034, China;3. School of Energy & School of Physical Science and Technology, Soochow University, Suzhou 215006, China;1. School of Information Engineering, Guangdong University of Technology, Guangzhou 510006, China;2. School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China |
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| Abstract: | The design and development of an Abbe-compliant linear encoder-based measurement system for position measurement with a targeted 20 nm uncertainty (k = 2) in machine tools and CMMs is presented. It consists of a linear scale and a capacitive sensor, mounted in line on an interface which is guided in the scale's measurement direction and driven by a linear motor based on the output signal of the capacitive sensor. The capacitive sensor measures the displacement of a target surface on the workpiece table. The functional point, which is the center of a tool or touch probe, is always aligned with the scale and capacitive sensor such that this configuration is compliant with the Abbe principle. Thermal stability is achieved by the application of a thermal center between the scale and capacitive sensor at the tip of the latter, which prevents both components to drift apart. Based on this concept, a prototype of a one-DOF measurement system was developed for a measurement range of 120 mm, together with an experimental setup aimed at verifying the reproducibility of the system for changing ambient conditions of ±0.5 °C and ±5%rh and the repeatability during tracking of a target surface over a short period of time. These experiments have shown that the measurement uncertainty of the one-DOF system is below 29 nm with a 95% confidence level. |
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| Keywords: | Abbe principle Linear encoder Ultra-precision Metrology Thermal error Uncertainty Mechatronic Machine tool Coordinate measuring machine (CMM) |
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