首页 | 本学科首页   官方微博 | 高级检索  
     


High-performance facility and techniques for high-precision machining of optical components by ion beams
Affiliation:1. Institute for Physics of Microstructures of the Russian Academy of Sciences, GSP-105, 603950 Nizhny Novgorod, Russia;2. Nizhny Novgorod N.I. Lobachevskii State University, av. Gagarina, 23, 603950 Nizhny Novgorod, Russia;1. Vienna University of Technology, Getreidemarkt 9 BA-09, Vienna 1060, Austria;2. Tecnical University of Sofia, 8 Kliment Ohridski blvd., Sofia 1000, Bulgaria;1. College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha 410073, China;2. Hu''nan Key Laboratory of Ultra-precision Machining Technology, Changsha 410073, China;1. Ultrahigh Precision Optics Technology Team, RIKEN Center for Advanced Photonics (RAP), RIKEN, Wako, Saitama 351-0198, Japan;2. Mechano Transformer Corp., Tokyo, 101-0044, Japan
Abstract:
Keywords:Roughness  Polishing  Aspherics  Optical fabrication  X-rays  Soft x-rays  Extreme ultraviolet (EUV)
本文献已被 ScienceDirect 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号