Long term stability of silicon roughness standards |
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| Affiliation: | 1. Molecular & Cellular Biology, Indiana University, Bloomington, IN, United States;2. Assembly BioSciences, Bloomington, IN, United States;3. Assembly BioSciences, San Francisco, CA, United States;1. School of Business and Administration, Wawasan Open University, Malaysia;2. Faculty of Business and Finance, Universiti Tunku Abdul Rahman, Malaysia;3. Faculty of Business & Information Science, UCSI University, Malaysia;1. State Key Laboratory Breeding Base for Zhejiang Sustainable Pest and Disease Control, Institute of Plant Protection and Microbiology, Zhejiang Academy of Agricultural Sciences, Hangzhou 310021, PR China;2. 20, Jalan Tan Jit Seng, 11200 Tanjong Bungah, Penang, Malaysia;3. Centre for Agro Biosciences International, PO Box 210 UPM, Serdang, Malaysia;1. Centro de Economía y Política Regional (CEPR), Business School, Universidad Adolfo Ibáñez, Ave. Padre Hurtado 750, Viña del Mar, Chile;2. Regional Economics Applications Laboratory (REAL), University of Illinois at Urbana-Champaign, 607 S. Mathews Ave., Urbana IL 61801 United States |
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| Abstract: | In 1986 the roughness reference standards made of silicon were produced at the Laboratory for Precise Measurements of Length (LFSB), which is now a part of Croatian Metrology Institute (HMI) designated as HMI/FSB-LPMD. At that time, roughness standards were commonly made either from steel or glass.After 3 decades of use it was decided to conduct a research of metrological features on two silicon roughness standards which were continuously used as primary standards for roughness in Croatia.The analysis is based on measurement results of roughness parameters (Ra, Rz and RSm) from calibration certificates provided by several national metrology institutes.Statistical consistency is checked with Birge ratio test, and En values are calculated in order to check if significant change of roughness parameters over the years can be determined. |
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| Keywords: | Silicon roughness standards Long term stability |
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