| 稀土Dy掺杂纳米SnO2薄膜的结构与气敏特性 |
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| 引用本文： | 闫君,李健,汪良. 稀土Dy掺杂纳米SnO2薄膜的结构与气敏特性[J]. 功能材料与器件学报, 2009, 15(4) |
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| 作者姓名： | 闫君 李健 汪良 |
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| 作者单位： | 内蒙古大学,物理科学与技术学院,呼和浩特,010021;内蒙古大学,物理科学与技术学院,呼和浩特,010021;内蒙古大学,物理科学与技术学院,呼和浩特,010021 |
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| 基金项目： | 内蒙古自治区自然科学基金项目，内蒙古自治区高等学校科学研究项目 |
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| 摘 要： | 采用真空蒸发法在玻璃衬底上制备稀土Dy掺杂Sn薄膜,对薄膜进行合适的氧化、热处理后获得Dy掺杂SnO2薄膜.用X射线衍射、场发射扫描电子显微镜、静态配气法对薄膜性能进行测试,研究不同掺Dy含量和热处理条件对SnO2薄膜的影响.结果显示,制备的SnO2薄膜呈金红石结构为n型;在相同热处理条件下,Dy掺杂可明显缩短薄膜氧化、热处理的时间;适当掺入稀土Dy可明显改善SnO2薄膜的结构、气敏特性.掺Dy 3at%后可大大提高SnO2薄膜对丙酮气体的灵敏度.
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| 关 键 词： | 真空蒸发 SnO2薄膜 Dy掺杂 气敏特性 |
Structure and gas sensing properties of SnO_2 nanometer films by Dy-Doped |
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| YAN Yun,LI Jian,WANG Liang. Structure and gas sensing properties of SnO_2 nanometer films by Dy-Doped[J]. Journal of Functional Materials and Devices, 2009, 15(4) |
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| Authors: | YAN Yun LI Jian WANG Liang |
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| Affiliation: | School of Physical Science and Technology;Inner Mongol University;Hohhot 010021;China |
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| Abstract: | Dy-doped SnO_2 thin films were prepared by vacuum evaporation on glass substrates to obtain the SnO_2: Dy thin films by oxidation and heat treatment of Sn films.Properties of the films were tested by XRD,FE-SEM and stationary state gas distribution method to study the influence of different Dy doping content and heat treatment condition on SnO_2 thin films.The results showed that the SnO_2 thin films showed n-type rutile structure.The time of oxidation and heat treatment of the thin films reduced obviously ... |
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| Keywords: | vacuum evaporation SnO_2 thin films Dy-doping gas sensing |
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