非球面超精密磨削误差建模与补偿研究

为提高课题组自研的超精密磨床加工精度，基于多体系统理论，运用齐次坐标变换原理，分析该超精密磨床37项几何误差来源，对非球面超精密磨削的综合误差建模。超精密磨床的多项几何误差元素已在制造阶段标定、补偿，取砂轮对刀误差和砂轮轮廓半径磨损误差作为主要面形误差来源，分别推导其对综合误差的传递函数，分析误差辨识方法，建立误差修正补偿模型，提出基于直接补偿的点补修正法。试验结果表明：建立的综合误差模型正确，根据误差辨识方法和修正补偿模型，修正误差后面形误差显著降低，有效提高面形精度。

Research on Error Modeling and Compensation of Aspheric Ultra-precision Grinding

In order to improve the accuracy of the self-developed ultra-precision grinding machine, based on the theory of multi-body system and the principle of homogeneous coordinate transformation, 37 geometric errors were analyzed. A number of geometric error elements of ultra-precision grinders have been calibrated and compensated in the manufacturing stage. The tool setting deviation of the grinding wheel and the contour radius wear deviation of the grinding wheel were taken as the main sources of surface errors. The transfer function to the integrated error was deduced separately, the error identification method was analyzed, the error correction compensation model was established, and the point compensation correction method based on direct compensation was proposed. The test results show that the comprehensive error model established is correct. According to the error identification method and the correction compensation model, the error is significantly reduced, which effectively improves the surface accuracy.