Abscheidung von Hartstoffschichten des Typs (B,C,N) bei niedrigen Beschichtungstemperaturen im PACVD-Prozeß |
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| Authors: | K-T Rie A Gebauer J Whle G Erker R Mohr C Sarter |
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| Affiliation: | K.-T. Rie,A. Gebauer,J. Wöhle,G. Erker,R. Mohr,C. Sarter |
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| Abstract: | Deposition of hard coatings type (B,C,N) at low coating temperatures by PACVD In this study the deposition of (B,C,N) layers by means of low temperature (250°C) pulsed DC plasma assisted CVD process was investigated using a metallo-organic compound as precursor being synthesized in a new way. It is shown that the deposition of (B,C,N) layers is possible with high hardness and adhesion in the investigated parameter range. |
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