Abstract: | It is shown that the scanning electron microscope (SEM) is an invaluable tool for the investigation of etched ion tracks, particularly in the submicron range. The SEM makes it possible to measure doses with track detectors two orders of magnitude higher than when they are measured by a light microscope. Furthermore, the SEM is used for investigation of the etched-track cross sections over the full length of the channels. Growing of metal needles in the membranes by microgalvanic deposition allows replication of the form of the etched channels. After the membrane is dissolved, the metal needle replicas instead of the membrane can be investigated. It will be shown that the SEM is an important tool for the investigation of etched heavy ion tracks in solids. |