Quartz rate gyro sensor for automotive control

A new quartz rate gyro sensor has been developed for automotive controls. The principle of the sensor is detection of the Coriolis force with a vibrator. An H shape vibrator supported with a stem at its center was used. The vibrator supported at the center was good for the isolation of a small detection motion from a large excitation motion. A new mechanical coupling model and the FEM analysis were used to reduce output offset of the sensor. The detection range of the sensor is from ?100 to 100°/s. The sensor output offset is small within ±1°/s in the wide temperature range from ?30 to 85 °C. The developed quartz rate sensor satisfied required specifications and wide temperature stability.