High-performance coatings for micromechanical mirrors |
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| Authors: | Gatto Alexandre Yang Minghong Kaiser Norbert Heber Jörg Schmidt Jan Uwe Sandner Thilo Schenk Harald Lakner Hubert |
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| Affiliation: | Fraunhofer Institut für Angewandte Optik und Feinmechanik, Albert Einstein Strasse 7, Jena 07745, Germany. a.gatto@zeiss.de |
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| Abstract: | High-performance coatings for micromechanical mirrors were developed. The high-reflective metal systems can be integrated into the technology of MOEMS, such as spatial light modulators and microscanning mirrors from the near-infrared down to the vacuum-ultraviolet spectral regions. The reported metal designs permit high optical performances to be merged with suitable mechanical properties and fitting complementary metal-oxide semiconductor compatibility. |
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