离子束辅助沉积引发互不固溶系非晶相和亚稳晶相形成

利用离子束辅助沉积技术（IBAD）研究了在互不固溶的Cu-Ta和Cu-Nb系统中获得非晶相和亚稳晶体的可能性，结果表明：r(Cu)为30％时Cu含量的Cu-Ta薄膜得到了非晶相；r(Cu)为25％－35％时Cu-Nb薄膜中随辅助等离子束能量的改变出现了fcc相－非晶相转变；r(Cu）和20％时Cu-Nb薄膜中得到了bcc相，说明IBAD技术可以在互不固溶二元合金系统中制备非晶和亚稳晶相，非晶或亚稳晶的形成是由薄膜沉积过程中辅助离子束的作用引起的。

Amorphous and metastable crystalline phases formed by ion beam assisted deposition in the immiscible systems

The possibility of formation of amorphous and metastable crystalline phases by ion beam assisted deposition (IBAD) technique in the immiscible Cu-Ta and Cu-Nb systems was investigated in this paper. The experimental results revealed that,the amorphous phase was obtained in the film with the composition of about Cu 30 Ta 70 in the Cu-Ta films; a fcc amorphous transformation accompanying with energy change of ion beam was observed in the Cu-Nb films around the 25 at.%-35 at.% Cu fraction; and the bcc phase was obtained in the Cu 20 Nb 80 films. Therefore, the IBAD technique is able to prepare amorphous and metastable crystalline phases in the immiscible binary metal systems. The formation of amorphous or metastable crystalline phases is induced by the action of the assisting ion beam during the deposition process.