| 采用衍射、干涉技术提高光电轴角编码器的测角精度和分辨率 |
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| 引用本文： | 孔智勇,赵红颖,熊文卓,艾华.采用衍射、干涉技术提高光电轴角编码器的测角精度和分辨率[J].光学精密工程,2001,9(3):260-265. |
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| 作者姓名： | 孔智勇 赵红颖 熊文卓 艾华 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所, |
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| 基金项目： | 中科院应用研究重点项目 |
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| 摘 要： | 光电轴角编码器广泛应用于精密角位置的测量、数控及数显系统中,是国内外研究的热点.采用衍射、干涉技术的光电轴角编码器(简称激光编码器)具有结构紧凑、小型化;分辨率和测角精度高;响应频率高等优点.通过对几种激光编码器的成功方案的深入分析,阐述了这项技术的最新进展和所面临的问题.
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| 关 键 词： | 光电轴角编码器 激光编码器 衍射干涉 |
| 文章编号： | 1004-924(2001)03-0260-06 |
| 收稿时间： | 2001-03-07 |
| 修稿时间： | 2001年3月7日 |
Improving angle-measuring precision and resolution of photoelectric rotary encoders using diffraction interference technology |
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| KONG Zhi yong,ZHAO Hong ying,XIONG Wen zhuo,AI Hua.Improving angle-measuring precision and resolution of photoelectric rotary encoders using diffraction interference technology[J].Optics and Precision Engineering,2001,9(3):260-265. |
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| Authors: | KONG Zhi yong ZHAO Hong ying XIONG Wen zhuo AI Hua |
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| Affiliation: | Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130022, China |
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| Abstract: | Photoelectric rotary encoder, which is also called photoelectric angle position sensor, is a kind of digital angle measuring device combining with optics, mechanics and electronics. The photoelectric rotary encoder has been used widely in the systems of fine angel position measurement, digital control and digital display. The photoelectric rotary encoders using diffraction interference technology (shortened form laser encoder) is characterized by compact structure, miniaturization, high accuracy and high resolution, and high frequency response. This paper analyzes a few kinds of successful schemes of laser encoders, and also expounds new headway and the technology problems concerned.words :photoelectricrotaryencoders;diffracti |
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| Keywords: | photoelectric rotary encoders diffraction interference laser encoders |
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