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Vapor sorption in thin supported polymer films studied by white light interferometry
Authors:Kyriaki Manoli  Dimitris Goustouridis  Ioannis Raptis  Merope Sanopoulou
Affiliation:a Institute of Microelectronics, NCSR “Demokritos”, 15310 Ag. Paraskevi Attikis, Athens, Greece
b Institute of Physical Chemistry, NCSR “Demokritos”, 15310 Ag. Paraskevi Attikis, Athens, Greece
c Department of Electronics, Technological Educational Institute of Athens, 12210 Aegaleo, Greece
Abstract:In the present study, we apply a white light interferometric methodology to study sorption of moisture and methanol vapor in thin films of poly(2-hydroxyethyl methacrylate) PHEMA] and poly(methyl methacrylate) PMMA], supported on oxidized silicon wafers. The measured equilibrium thickness expansion of each film, exposed to different activities of the vapor penetrant, is used to determine the sorption isotherm of the system. Results for relatively thick films (100 nm < Lo < 600 nm) are compared with corresponding literature data for bulk, free-standing films, obtained by direct gravimetric methods. Furthermore, PMMA films of thicknesses lower than 100 nm were employed in order to study the effect of the dry film's thickness, and of substrate, on fractional swelling.
Keywords:Vapor sorption  Poly(2-hydroxyethyl methacrylate)  Poly(methyl methacrylate)
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