A novel reactor for large-area epitaxial solar cell materials |
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| Affiliation: | 1. Collaborative Innovation Center of Chemistry for Energy Materials, Shanghai Key Laboratory of Molecular Catalysis and Innovative Materials, Department of Chemistry, Fudan University, Shanghai 200438, China;2. State Key Laboratory of Molecular Engineering of Polymers and Department of Macromolecular Science, Fudan University, Shanghai 200438, China;3. PLA Naval Medical Center, 5 Panshan Rd, Shanghai 200052, China;1. Department of Pharmacology, Toxicology and Neuroscience, LSU Health Sciences Center, Shreveport, LA, USA;2. Department of Pathology, LSU Health Sciences Center, Shreveport, LA, USA;1. Department of Mechanical Engineering, Sharif University of Technology, Tehran, Iran;2. Department of Renewable Energies, Faculty of New Science and Technologies, University of Tehran, Tehran, Iran;3. Department of Energy Engineering, Graduate School of the Environment and Energy, Science and Research Branch, Islamic Azad University, Tehran, Iran;1. Departamento de Psiquiatría, Universidad de Oviedo, Oviedo, Spain;2. Centro de Investigación Biomédica en Red de Salud Mental, CIBERSAM, Spain;3. Instituto Universitario de Neurociencias del Principado de Asturias, INEUROPA, Oviedo, Spain;4. Servicio de Salud del Principado de Asturias, SESPA, Asturias, Spain;5. Departamento de Construcción e Ingeniería de Fabricación, Universidad de Oviedo, Oviedo, Spain;6. National Suicide Research Foundation, Cork, Ireland |
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| Abstract: | A novel vertical stagnation flow organometallic vapor phase epitaxy reactor was designed and fabricated for the growth of GaAs and AlGaAs for solar cell applications. The reactor had an inverted configuration to eliminate recirculation problems. The susceptor and gas inlet nozzle were closely spaced (about 1 cm) in order to achieve improvements in deposition efficiency, layer uniformity and abruptness of interfaces. A specially designed water-cooled inlet nozzle was used to maintain the nozzle surface at relatively low temperatures under all operating conditions. A computer model was formulated to study the various thermal processes in this reactor. The model used rigorous thermal boundary conditions which included thermal radiation effects. Simulated and experimental nozzle temperatures were compared for different susceptor temperatures, susceptor-nozzle distances, gas flow rates and reactor pressures. The maximum nozzle temperature was about 100 °C, which is sufficiently low to prevent premature decomposition of the reactants on its surface. |
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