High-Temperature Leakage Improvement in Metal–Insulator–Metal Capacitors by Work–Function Tuning |
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Authors: | Chiang K. C. Cheng C. H. Pan H. C. Hsiao C. N. Chou C. P. Chin A. Hwang H. L. |
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Affiliation: | Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu; |
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Abstract: | Using low-cost and high work-function Ni, a low leakage current of 5times10-6 A/cm2 at 125 degC is obtained in a high 25-fF/mum2-density SrTiO3 metal-insulator-metal (MIM) capacitor processed at 400 degC. This is approximately two orders of magnitude better than the same device using a TaN electrode, with added advantages of improved voltage and temperature coefficients of capacitance. This work-function tuning method also has merit for achieving both low thermal leakage and high overall kappa value beyond previous laminate structure |
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