| ZnO/SnO2双层膜的结构及敏感特性研究 |
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| 引用本文： | 娄向东,沈荷生,沈瑜生.ZnO/SnO2双层膜的结构及敏感特性研究[J].传感技术学报,1995,8(2):20-23. |
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| 作者姓名： | 娄向东 沈荷生 沈瑜生 |
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| 作者单位： | 河南师范大学化学系!河南新乡453002(娄向东)，中国科学技术大学材料科学与工程系!合肥230026(沈荷生，沈瑜生) |
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| 摘 要： | 将ＳｎＯ２及ＺｎＯ粉末压制成靶材，采用溅射衍制备了ＺｎＯ／ＳｎＯ２双层薄膜，用ＸＰＳ，ＸＲＤ，ＳＥＭ等手段对制得的薄膜进行分析测试，发现双层膜表面有一定量的吸附氧存在，双层膜中锌、锡有一定的相互扩散，比较了单层ＳｎＯ２及ＺｎＯ膜与双层膜的气敏特性，结果表明双层膜在灵敏度及选择性方面都优于单层膜。
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| 关 键 词： | 气敏元件 双层膜 氧化锌 氧化锡 敏感特性 |
A Study on Structure and Gas-SensitiveCharacter of ZnO/SnO_2 Bilayer Film |
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| Lou Xiangdong Shen Hesheng Shen Yusheng.A Study on Structure and Gas-SensitiveCharacter of ZnO/SnO_2 Bilayer Film[J].Journal of Transduction Technology,1995,8(2):20-23. |
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| Authors: | Lou Xiangdong Shen Hesheng Shen Yusheng |
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| Abstract: | In this paper, the ZnO/SnO2 bilayer film was prepared by DC sputteringmethod with targets of pure SnO2 and ZnO powder. The bilayer film was analysed byXPS, XRD, SEM techniques, and the results showed that there is a few of absorbedoxygen on the bilayer surface. The zinc and tin atoms diffused each other on some ex-tent in the interface. Gas-senstive characteristic of bilayer was also studied. The ZnO/SnO2 bilayer has better sensitivity and selectivity compared with the ZnO or SnO2 singlelayeralone. |
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| Keywords: | gas sensor ZnO3 SnO2 bilayer film |
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