| 基于DSP的激光外差干涉信号处理方法 |
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| 引用本文： | 赵思维,严利平,杨涛,周砚江,陈本永. 基于DSP的激光外差干涉信号处理方法[J]. 浙江理工大学学报, 2011, 28(2) |
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| 作者姓名： | 赵思维 严利平 杨涛 周砚江 陈本永 |
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| 作者单位： | 浙江理工大学纳米测量技术实验室,杭州,310018 |
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| 摘 要： | 描述激光外差干涉测量的原理,设计基于DSP的激光外差干涉信号处理方法,用DSP的捕捉单元获取参考信号和测量信号的上升沿时间差,在捕捉单元中断中计算测量信号周期,由DSP将时间差转化为相位差并得出被测位移.采用信号发生器模拟两路输入信号,在0～360°范围内进行相位差测量实验,测量结果表明标准偏差为0.041°、线性拟合相关系数为0.999 89.以20 nm为步长在0～320 nm范围内进行位移测量实验,实验结果表明标准偏差为2.46 nm、线性拟合相关系数为0.999 71,验证了所设计的信号处理方法的可行性和实用性.
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| 关 键 词： | 纳米测量 激光外差干涉 信号处理 捕捉单元 |
Signal Processing Method of the Laser Heterodyne Interferometry Based on DSP |
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| ZHAO Si-wei,YAN Li-ping,YANG Tao,ZHOU Yan-jiang,CHEN Ben-yong. Signal Processing Method of the Laser Heterodyne Interferometry Based on DSP[J]. Journal of Zhejiang Sci-tech University, 2011, 28(2) |
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| Authors: | ZHAO Si-wei YAN Li-ping YANG Tao ZHOU Yan-jiang CHEN Ben-yong |
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| Affiliation: | ZHAO Si-wei,YAN Li-ping,YANG Tao,ZHOU Yan-jiang,CHEN Ben-yong(Nanometer Measurement Lab,Zhejiang Sci-Tech University,Hangzhou 310018,China) |
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| Abstract: | The principle of laser heterodyne interferometry is introduced.The signal processing method of the heterodyne interferometer is designed based on digital signal processor(DSP).Time difference between the rising edges of reference signal and measurement signal is obtained by the enhanced capture module(ECAP) of DSP.The period of measurement signal is calculated in the interrupt service routine of ECAP.Then the phase difference is calculated according to the time difference and period of measurement signal.Th... |
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| Keywords: | DSP |
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