基于小孔夫琅和费衍射法的CCD光电响应特性标定研究

对CCD的光电响应特性进行标定，是保障CCD测量系统测量精度和系统可靠性的关键技术环节，对系统测量结果有着直接的影响。对现有的各种CCD光电响应特性标定方法进行对比分析后，引入小孔夫琅和费衍射的方法。推导了该法中Airy斑的理论相对光强分布I/I0与CCD像素位置n之间的定量关系，完成了对特定面阵CCD光电响应特性标定实验。在数据处理过程中采用二次曲线拟合法准确获得了灰度曲线的峰值位置，实现了Airy斑归一化理论光强分布曲线与CCD实测灰度分布曲线对准，解决了这种方法的中心对准问题。最终的标定结果经误差分析满足要求。

The pinhole Fraunhofer diffraction method of calibrating CCD optics-electron characteristic

The precision of calibrating the CCD’s optics-electron characteristic will directly affect the measured result. A new calibrate method was introduced after the analysis of several methods of calibrating CCD’s optics-electron characteristic had been performed. The ration relationship between I/I0(the relative light intensity distribution of Airy pattern in theory) and n(the position of CCD’s pels) had been deduced. In the data processing, the conics fitting method was adopt to locate the peak value of grey scale curve and the alignment of the peak of theory light intensity curve and that of measured grey scale curve was completed. In practical experiment， a given CCD was calibrated using this method and the result was reliable.