Supervisory control of a rapid thermal multiprocessor |
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Authors: | Balemi S. Hoffmann G.J. Gyugyi P. Wong-Toi H. Franklin G.F. |
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Affiliation: | Swiss Federal Inst. of Technol., Zurich; |
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Abstract: | An application of supervisory control theory to a piece of semiconductor manufacturing equipment is presented. The approach allows the flexible design and reliable update of processing recipes to accommodate frequently changing manufacturing requirements. An input-output interpretation of supervisory control theory is given. This interpretation leads to a generic implementation scheme for manufacturing systems. A synthesis fixpoint algorithm implementation using binary decision diagrams enables the design of supervisors of realistic size. A sample synthesis for an oxide growth recipe is performed on a state space of the order of 106 states. The actual implementation of the logic sequencing control software for the application under investigation is described |
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