首页 | 本学科首页   官方微博 | 高级检索  
     

应变p型Si1-xGex层中载流子冻析
引用本文:张万荣,李志国,罗晋生,孙英华,程尧海,陈建新,沈光地.应变p型Si1-xGex层中载流子冻析[J].电子学报,1998,26(11):51-54.
作者姓名:张万荣  李志国  罗晋生  孙英华  程尧海  陈建新  沈光地
作者单位:1. 北京工业大学电子工程系,北京,100022
2. 西安交通大学微电子研究所,西安,710049
基金项目:北京市科技新星计划基金,电子元器件可靠性国家重点实验室基金
摘    要:本文用解析的方法研究了应变P型Si1-xGex层中载流子冻析现象,研究发现,用Si归一化的Si1-xGex价带有效态密度、随x的增加而减小,而且温度T越低,随Ge组份x的增加而减少的速度越快,与Si相比,常温下Ge组份x几乎对电离 杂质浓度没有什么影响,而在低温下,随Ge组份x的增加,电离杂质浓度随之增加,载流子冻析减弱,这对低温工作的Si1-xGex器件有利。

关 键 词:应用Si1-xGex层  载流子冻析  电离杂质浓度

Carrier Freeze-Out in Strained p-Si1-xGex Layers
Abstract:The caaccer freeze-out in strained p-Si1--Gex layers is studied analytically. It is found that as the Ge fraction increases, the valences effective densities of states(Nv)SiGe/(Nv)Si normlized bythat in Si decreases, furthermore, as the temperature beecomes lower, the decrease in (Nv)SiGe/(Nv)Si becomes more rapid. It is also shown that as the Ge fraction increases, although it has little effect on theionized doping concentration at room temperature, the ionias doping concentration inereases at low temperatures compared with that in Si. This implies that caaccer freeze-out is mitigated at low temperatures,which is beneficial to the operation of Sil-Gex-based devices at low temperatures.
Keywords:Strained Si_(1-x)Ge_x layers  Catrier freeze-out  Ionized doping concentration  
本文献已被 CNKI 维普 万方数据 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号