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Al-doped ZnO nanostructured powders by emulsion detonation synthesis – Improving materials for high quality sputtering targets manufacturing
Affiliation:1. INNOVNANO, Materiais Avançados, SA, 3040-570 Antanhol, Portugal;2. CENIMAT/I3N, Departamento de Ciência dos Materiais, Faculdade de Ciências e Tecnologia, FCT, Universidade Nova de Lisboa and CEMOP-UNINOVA, 2829-516 Caparica, Portugal;3. CQFM and IN, Departamento de Eng. Química, Instituto Superior Técnico, Universidade Técnica de Lisboa, 1049-001 Lisboa, Portugal;1. School of Aerospace, Mechanical & Manufacturing Engineering, RMIT University, Melbourne, VIC 3001, Australia;2. The University of Queensland, School of Mechanical and Mining Engineering, Brisbane, QLD 4072, Australia;1. Ceramics Laboratory, Swiss Federal Institute of Technology, EPFL, CH-1015 Lausanne, Switzerland;2. Graduate School at Shenzhen, Tsinghua University, 518055 Shenzhen, China;3. MacDiarmid Institute for Advanced Materials and Nanotechnology, Victoria University of Wellington, New Zealand;4. Institute of Physics AS CR, Na Slovance 2, 182 21 Prague 8, Czech Republic;1. Departamento de Ingeniería Mecánica, Energética y de los Materiales, Universidad de Extremadura, 06006 Badajoz, Spain;2. Instituto de Cerámica y Vidrio, Consejo Superior de Investigaciones Científicas, 28049 Madrid, Spain;1. Center of Materials Science and Technology, Nuclear and Energy Research Institute – IPEN, 2242 Lineu Prestes Avenue, University City, São Paulo, Brazil;2. Federal University of Rio Grande do Norte – UFRN, University Camp of Lagoa Nova, Rio Grande do Norte, Natal, Brazil;1. State Key Laboratory of Rare Earth Resource Utilization, Changchun Institute of Applied Chemistry, Chinese Academy of Sciences, Changchun 130022, Jilin, China;2. Graduate School of University of Chinese Academy of Sciences, Beijing 100049, China;3. Department of Chemical and Biological Engineering, Changsha University of Science and Technology, Changsha 410114, China
Abstract:Emulsion detonation synthesis method was used to produce undoped and Al-doped ZnO nanostructured powders (0.5–2.0 wt.% Al2O3). The synthesized powders present a controlled composition and a morphology which is independent on the doping level. The XRD results indicate wurtzite as the single phase for undoped ZnO and the presence of gahnite as secondary phase for Al-doped ZnO powders. The sintering behavior of each powder was studied based on their linear shrinkage and shrinkage rate curves, showing the high sinterability of the powders. Activation energies for densification in the earlier stage were calculated for all compositions and possible sintering mechanisms are suggested depending on the doping level. The high chemical homogeneity and sinterability and the lower electrical resistivity of the bulk Al-doped sintered samples demonstrates the feasibility of emulsion detonation synthesis for the production of high quality Al-doped ZnO powders to be used in ceramic sputtering targets manufacture.
Keywords:Nanoparticle synthesis  Aluminum doped zinc oxide (AZO)  Sintering
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