| Affiliation: | 1. Laboratory for MEMS Applications, IMTEK – Department of Microsystems Engineering, University of Freiburg, Georges-Koehler-Allee 103, 79110 Freiburg, Germany;2. HSG-IMIT – Institut für Mikro- und Informationstechnik, Georges-Koehler-Allee 103, 79110 Freiburg, Germany;1. School of Mechanical and Electronical Engineering, Central South University, Changsha, 410083, PR China;2. School of Information Science and Engineering, Central South University, Changsha, 410083, PR China;3. State Key Laboratory of High Performance Complex Manufacturing, Changsha, 410083, PR China;1. Operations Intelligence & Safety, Siemens Energy, Inc., 4615 Southwest Freeway, Suite 900, Houston, TX 77027, USA;2. Texas A&M University, College Station, TX 77843, USA;1. Dalian University of Technology, Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian, 116024, China;2. Dalian University of Technology, Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian 116085, China;1. Division of Life Science and Health, The Graduate School at Shenzhen, Tsinghua University, Shenzhen 518055, China;2. Department of Chemistry, Tsinghua University, Beijing 100084, China |
