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A piezoelectric microvalve with a flexure-hinged driving frame and microfabricated silicon sealing pair |
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| Affiliation: | 1. School of Information Science and Engineering, Central South University, Changsha 410083, China;2. School of Mechanical and Electrical Engineering and State Key Laboratory of High Performance Complex Manufacturing, Central South University, Changsha 410083, China;3. Wuhan Binhu Electronic CO, LTD, Wuhan 430205, China;1. College of Mechanical Engineering and Applied Electronics Technology, Beijing University of Technology, Beijing, China;2. Beijing Vocational College of Agriculture, Beijing, 102208, China;1. Department of Mechanical Engineering, School of Engineering, Tokyo Institute of Technology, 4259, Nagatsuta-cho, Midori, Yokohama, Kanagawa, 226-8503, Japan;2. Department of Mechano Micro Engineering, Graduate School of Interdisciplinary Science and Technology, Tokyo Institute of Technology, 4259, Nagatsuta-cho, Midori, Yokohama, Kanagawa, 226-8503, Japan;1. Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore;2. Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore |
| Abstract: | This paper describes a piezoelectric microvalve for attitude control of micro-satellite with a mass in the range of 20–100 kg. The microvalve comprises of a driving mechanism with a flexure-hinged frame and a valve body with a silicon sealing pair. The silicon valve core with sealing rings can achieve a low leak rate with a small structural deformation. The driving mechanism using a flexure-hinged frame and piezoelectric actuators assures the microvalve normally closed and leads to a fast response of the microvalve. The response time of the driving mechanism is characterized to be as small as 0.6 ms. A maximum flow rate of 3100 mL/min is achieved at an inlet pressure of 0.6 MPa while applied with a maximum voltage of 200 V. The static power consumption is 48 mW with a driving voltage of 200 V, and the dynamic power consumption is approximately 0.9 W at 100 Hz. |
| Keywords: | Microvalve Piezoelectric Flexure hinge Micro-satellite |
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