| 磁控溅射Wox-Ti(Mo,Ni,V)薄膜的电致变色性能 |
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| 引用本文： | 黄佳木,徐爱娇,蔡明. 磁控溅射Wox-Ti(Mo,Ni,V)薄膜的电致变色性能[J]. 材料导报, 2007, 21(4): 144-146,154 |
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| 作者姓名： | 黄佳木 徐爱娇 蔡明 |
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| 作者单位： | 重庆大学材料科学与工程学院,重庆,400045;重庆大学材料科学与工程学院,重庆,400045;重庆大学材料科学与工程学院,重庆,400045 |
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| 摘 要： | 采用反应磁控溅射工艺分别制备掺杂Ti、Mo、Ni、V的WOx薄膜,研究了掺杂对其电致变色性能的影响机理.实验结果表明,适量的掺杂可以提高薄膜的电致变色性能,Mo的掺杂可以调节光谱吸收范围,Ni、V的掺杂可以提高记忆存储能力,Ti的掺杂可以延长循环寿命;磁控溅射制备的掺杂WOx薄膜均为非晶态.
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| 关 键 词： | WOx 薄膜 电致变色 掺杂 磁控溅射 |
The Electrochromic Properties of WOx Film Doped with Ti (Mo, Ni, V) by Magnetron Sputtering |
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| HUANG Jiamu,XU Aijiao,CAI Ming. The Electrochromic Properties of WOx Film Doped with Ti (Mo, Ni, V) by Magnetron Sputtering[J]. Materials Review, 2007, 21(4): 144-146,154 |
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| Authors: | HUANG Jiamu XU Aijiao CAI Ming |
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| Affiliation: | College of Materials Science and Engineering, Chongqing University, Chongqing 400045 |
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| Abstract: | WOx films doped with Ti (Mo, Ni, V) are deposited on ITO glass substrates by reactive magnetron sputtering.Their electrochromic properties and influence mechanism are studied. Experiment results demonstrate that in a certain doping range , WOx films doped with Ti (Mo, Ni, V) would improve the electrochromic performances. The spectrum could be widened by Mo-doping.The ability of color storage could be improved by Ni or V doping and the cyclic life span could be longer by Ti doping. WOx films after doping are still in amorphous state. |
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| Keywords: | WOx |
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