| 瞄准误差对多通道X射线KB显微镜一致性的影响 |
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| 引用本文： | 陈志强,李亚冉,忻秋琪,穆宝忠. 瞄准误差对多通道X射线KB显微镜一致性的影响[J]. 光学仪器, 2019, 41(2): 66-71 |
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| 作者姓名： | 陈志强 李亚冉 忻秋琪 穆宝忠 |
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| 作者单位： | 同济大学 物理科学与工程学院,上海 200092;同济大学 教育部先进微结构材料重点实验室,上海 200092;同济大学 物理科学与工程学院,上海 200092;同济大学 教育部先进微结构材料重点实验室,上海 200092;同济大学 物理科学与工程学院,上海 200092;同济大学 教育部先进微结构材料重点实验室,上海 200092;同济大学 物理科学与工程学院,上海 200092;同济大学 教育部先进微结构材料重点实验室,上海 200092 |
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| 基金项目： | 国家重点研发计划项目（2017YFA0403300） |
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| 摘 要： | 围绕着八通道Kirkpatrick-Baez(KB)显微镜在神光-Ⅲ主机上的应用,分析了瞄准误差对该显微镜成像性能和通道间一致性的影响。通过光线追迹,模拟了X射线显微镜的空间分辨率、像点间隔和系统效率随视场和物像距的变化。从中心视场到±200μm视场,空间分辨率下降约2.9μm;从中心视场到±150μm视场,系统效率降低了约60%;物距变化量在±200μm范围时,像点间隔变化值约为0.67 mm,显微镜系统效率变化约为7%;像距变化量在±20mm范围时,像点间隔变化值约为0.70 mm。结果表明,视场中心瞄准误差严重影响空间分辨率和效率,但对各通道间的像间隔影响较小。物距和像距误差对像间隔影响较大,但对空间分辨率和系统效率影响较小。
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| 关 键 词： | KB显微镜 空间分辨率 像间隔 系统效率 |
| 收稿时间： | 2018-06-04 |
The effect of aiming error on the consistency of multichannel X-ray Kirkpatrick-Baez microscope |
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| CHEN Zhiqiang,LI Yaran,XIN Qiuqi and MU Baozhong. The effect of aiming error on the consistency of multichannel X-ray Kirkpatrick-Baez microscope[J]. Optical Instruments, 2019, 41(2): 66-71 |
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| Authors: | CHEN Zhiqiang LI Yaran XIN Qiuqi MU Baozhong |
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| Affiliation: | School of Physics Science and Engineering, Tongji University, Shanghai 200092, China;Key Laboratory of Advanced Micro-structured Materials, Ministry of Education, Tongji University, Shanghai 200092, China,School of Physics Science and Engineering, Tongji University, Shanghai 200092, China;Key Laboratory of Advanced Micro-structured Materials, Ministry of Education, Tongji University, Shanghai 200092, China,School of Physics Science and Engineering, Tongji University, Shanghai 200092, China;Key Laboratory of Advanced Micro-structured Materials, Ministry of Education, Tongji University, Shanghai 200092, China and School of Physics Science and Engineering, Tongji University, Shanghai 200092, China;Key Laboratory of Advanced Micro-structured Materials, Ministry of Education, Tongji University, Shanghai 200092, China |
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| Abstract: | |
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| Keywords: | KB microscope spatial resolution image interval system efficiency |
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