| 表面横波谐振器的仿真与设计 |
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| 引用本文： | 杜波,石玉,王华磊,蒋欣,黄华.表面横波谐振器的仿真与设计[J].压电与声光,2010,32(6). |
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| 作者姓名： | 杜波 石玉 王华磊 蒋欣 黄华 |
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| 作者单位： | 电子科技大学电子薄膜与集成器件国家重点实验室;中国电子科技集团公司第26研究所; |
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| 摘 要： | 针对现有表面横波谐振器设计软件仿真精度不够的问题,通过引入中间栅P矩阵模拟其对声波的反射和声速的调制作用,计算不同占空比栅阵的耦合模参数,在仿真中加入了中间栅周期、分布和换能器占空比等变量,实现了对中间栅、占空比的优化设计.利用寄生电路计算模块,分析了封装寄生参数的影响,进一步提高了仿真精度.利用该法设计了中心频率315 MHz、插入损耗12 dB、品质因数7 000的谐振器.经实验证实,仿真误差小于0.5%,仿真精度满足设计需要.
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| 关 键 词： | 表面波器件 谐振器 耦合模模型(COM) |
Simulation and Design of Surface Transverse Wave Resonators |
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| DU Bo,SHI Yu,WANG Hualei,JIANG Xin,HUANG Hua.Simulation and Design of Surface Transverse Wave Resonators[J].Piezoelectrics & Acoustooptics,2010,32(6). |
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| Authors: | DU Bo SHI Yu WANG Hualei JIANG Xin HUANG Hua |
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| Affiliation: | DU Bo1,2,SHI Yu1,WANG Hualei1,JIANG Xin2,HUANG Hua1(1.State Key Lab.of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,China,2.26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China) |
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| Abstract: | In order to improve the precise of the design software of surface transverse wave resonator(STWR),a center grating P matrix was introduced to simulate the effect of center gratings on wave reflection and the modulation of velocity;the coupling-of-modes parameters were computed for different metallization ratios gratings.Then,the variables of center grating period,location and IDT metallization ratio were included in the simulation to optimize their values.The precise of simulation was improved by using para... |
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| Keywords: | surface acoustic wave device resonator COM model |
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