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双光子聚合加工的光路模拟
引用本文:郑旭,左春柽,周晓勤.双光子聚合加工的光路模拟[J].激光技术,2015,39(3):325-328.
作者姓名:郑旭  左春柽  周晓勤
作者单位:1.吉林大学 机械科学与工程学院, 长春 130022
摘    要:为了研究双光子聚合加工光路系统对聚合效果的影响,使用ZEMAX软件对光路系统的3个主要部分,即扩束镜、扫描振镜和聚焦透镜分别进行了设计,然后将3个部分结合到一起,从整体上模拟了整个光路系统,并且在光路中放置探测器来监控激光光束的变化情况。从模拟结果中可以直观清晰地观察到激光光束的能量分布在光路中的变化情况,主要分析了扩束镜对最终聚焦效果的影响。结果表明,扩束倍数越大,扩束镜越靠近光源,聚焦后焦点处的能量越高。该模拟结果也为实际实验系统的搭建提供了依据。

关 键 词:激光技术    双光子聚合    光路模拟    ZEMAX软件    飞秒激光
收稿时间:2014-04-02

Optical route simulation of two-photon polymerization
ZHENG Xu,ZUO Chuncheng,ZHOU Xiaoqin.Optical route simulation of two-photon polymerization[J].Laser Technology,2015,39(3):325-328.
Authors:ZHENG Xu  ZUO Chuncheng  ZHOU Xiaoqin
Abstract:In order to study effect of optical route of two-photon polymerization on polymerization result, firstly, the mainly three parts i.e., beam expander, scanning galvanometer and focus lens were designed with ZEMAX software. Secondly, the whole optical route was simulated after combining the three parts together. The changes of the beam were monitored at different positions of the route with a detector. The variation of laser energy distribution could be seen in simulated diagrams and the influence of beam expander on the final focal results was analyzed. The results show that the larger the amplification multiple of the beam expander the smaller the distance between the beam expander and the light source, and the higher the energy density on the focus spot. The simulation results also provide the basis for actual experiment system construction.
Keywords:laser technique  two-photon polymerization  light route simulation  ZEMAX software  femtosecond laser
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