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非晶硅薄膜瞬态光电导的光致变化
引用本文:张世斌,孔光临,徐艳月,王永谦,刁宏伟,廖显伯. 非晶硅薄膜瞬态光电导的光致变化[J]. 半导体学报, 2002, 23(8): 794-799. DOI: 10.3969/j.issn.1674-4926.2002.08.002
作者姓名:张世斌  孔光临  徐艳月  王永谦  刁宏伟  廖显伯
作者单位:中国科学院半导体所,表面物理实验室,凝聚态物理中心,北京,100083;中国科学院半导体所,表面物理实验室,凝聚态物理中心,北京,100083;中国科学院半导体所,表面物理实验室,凝聚态物理中心,北京,100083;中国科学院半导体所,表面物理实验室,凝聚态物理中心,北京,100083;中国科学院半导体所,表面物理实验室,凝聚态物理中心,北京,100083;中国科学院半导体所,表面物理实验室,凝聚态物理中心,北京,100083
基金项目:国家重点基础研究发展计划(973计划)
摘    要:研究了非晶硅薄膜的瞬态光电导的光致变化情况.用通常的非晶态半导体的瞬态光电流的乘方规律和稳态光电导的扩展指数规律都不能对试验数据进行很好的拟合,而采用两个指数函数相加的形式可以对实验数据进行很好的拟合.这表明非晶硅薄膜长时间的衰退不是由带尾态决定,而是由深的陷阱决定的.两个指数函数的衰退分别对应于距导带0.52eV和0.59eV的两个陷阱,这两个陷阱可以被指认为带隙中的荷负电中心.光照后,带隙中的复合中心增加,导致电子寿命的减少,从而引起光电导的衰退.

关 键 词:非晶硅  瞬态光电导  光致变化

Light-Induced Changes in a-Si∶H Films Studied by Transient Photoconductivity
Zhang Shibin,Kong Guanglin,Xu Yanyue,Diao Hongwei,Wang Yongqian and Liao Xianbo. Light-Induced Changes in a-Si∶H Films Studied by Transient Photoconductivity[J]. Chinese Journal of Semiconductors, 2002, 23(8): 794-799. DOI: 10.3969/j.issn.1674-4926.2002.08.002
Authors:Zhang Shibin  Kong Guanglin  Xu Yanyue  Diao Hongwei  Wang Yongqian  Liao Xianbo
Abstract:Light induced changes in a-Si∶H films are investigated by transient photoconductivity.The transient photoconductivity decay data can neither be fit well by common power-law for transient photocurrent in amorphous semiconductors,nor by stretched exponential rule for transient decay from the steady state in photoconductivity.Instead,the data are fit fairly well with a sum of two exponential functions.The results show that the long time decay is governed by deep traps rather than band tail states,and two different traps locating separately at 0.52 and 0.59eV below Ec are responsible for the two exponential functions.They are designated as negatively charged dangling bond D- centers.The light-induced changes in photoconductivity are attributed mainly to the decrease in electron lifetime caused by the increase of recombination centers after light soaking.
Keywords:amorphous silicon  transient photoconductivity  light-induced change
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