| 用于标定镀膜机的膜厚样板的制备和测量 |
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| 引用本文： | 刘一,赵俊,邹子英,雷李华.用于标定镀膜机的膜厚样板的制备和测量[J].工业计量,2012(1):5-8. |
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| 作者姓名： | 刘一 赵俊 邹子英 雷李华 |
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| 作者单位： | [1]上海市计量测试技术研究院,上海201203 [2]中国科学院上海应用物理研究所,上海201203 |
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| 基金项目： | 国家质检总局科技计划项目：高精度台阶标准片的研制（2008qk74）; 机密测试技术及仪器国家重点实验室开放基金：纳米几何量标准样板的制备和溯源性研究（pil0913） |
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| 摘 要： | 镀膜在国民经济生活中得到广泛应用。影响镀膜性能的一个主要参数是膜层在整个基片上的厚度均匀性。利用挡板在基片上多个区域沉积台阶,测量台阶高度的差值用于分析膜厚的均匀性。通过集成非接触聚焦式测头的纳米测量机进行测量,针对镀膜产品上各个特殊的曲面台阶,以参差平方和为标准,用基底无台阶区域的曲线模型拟合台阶底部曲线,参考ISO 5436-1：2000的台阶评价方法,对镀膜基片上多台阶进行了评价。该方法可以用于镀膜机的验收。
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| 关 键 词： | 膜厚均匀性 纳米测量机 激光聚焦式测头 |
Manufacture and Measurement of Film Thickness Sample for Calibration of Coating Machine T Ttr ~r.1 2 1 l |
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| LIU Yi,ZHAO Jun,ZOU Zi-ying,LEI Li-hua.Manufacture and Measurement of Film Thickness Sample for Calibration of Coating Machine T Ttr ~r.1 2 1 l[J].Industrial Measurement,2012(1):5-8. |
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| Authors: | LIU Yi ZHAO Jun ZOU Zi-ying LEI Li-hua |
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| Affiliation: | 1 ( 1. Shanghai Institute of Measurement and Testing Technology, Shanghai 201203, China; 2. Shanghai Institute of Applied Physics, Chinese Academy of Science, Shanghai 201203, China) |
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| Abstract: | Coating technology is widely used to manufacture high quality film for precision machining. The performance of the film is greatly affected by its thickness uniformity. A film thickness sample is manufactured with several steps and the difference of step height is calculated for the analysis of thickness uniformity. The measurement of step height is carried out with a nano measuring machine integrated with laser focus sensor. The measurement data is evaluated according to ISO5436 - 1 ： 2000 with a best residual fitting bottom curve to decrease the error. |
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| Keywords: | film thickness nano measuring machine laser focus sensor |
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