Characterization of nanocrystalline diamond films implanted with nitrogen ions |
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| Affiliation: | 1. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, PR China;2. Lanzhou Institute of Physics, Lanzhou, 730000, PR China;1. Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor, Malaysia;2. Faculty of Electrical Engineering, Universiti Teknologi MARA (UiTM), 40450 Shah Alam, Selangor, Malaysia;1. Department of Chemical Engineering, Hanyang University, Haengdang-dong, Seongdong-gu, Seoul, 04763, South Korea;2. School of Chemical Engineering,480 Stadium Mall Drive, Purdue University, West Lafayette, IN 47907-2100, USA;1. Institute of Chemistry, São Paulo State University – UNESP, Araraquara, SP 14801-970, Brazil;2. São Carlos Institute of Chemistry, University of São Paulo, São Carlos, SP 13566-590, Brazil;1. Department of Materials Science & Engineering, University of California at Berkeley, and Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA;2. Sandia National Laboratories, Livermore, CA 94550, USA;1. State Key Laboratory of Chem-/Bio-Sensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha 410082, PR China;2. School of Physics and Electronics, Hunan University, Changsha 410082, PR China;3. Key Laboratory of Materials for Energy Conversion, Chinese Academy of Sciences, Department of Materials Science and Engineering, University of Science and Technology of China, Hefei, Anhui 230026, PR China;4. Key Laboratory of Colloid and Interface Chemistry, Ministry of Education, School of Chemistry and Chemical Engineering, Shandong University, Jinan 250100, PR China |
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| Abstract: | Nanocrystalline diamond films, prepared by a microwave plasma-enhanced CVD, were implanted using 110-keV nitrogen ions under fluence ranging from 1016–1017 ions cm−2. AFM, XRD, XPS and Raman spectroscopy were used to analyze the changes in surface structure and chemical state of the films before and after implantation. Results show that high-fluence nitrogen ions implanted in the nanocrystalline diamond film cause a decline in diamond crystallinity and a swelling of the crystal lattice; the cubic-shaped diamond grains in the film transform into similar roundish-shaped grains due to the sputtering effect of implanted nitrogen ions. Nitrogen-ion implantation changes the surface chemical state of the nanocrystalline diamond film. After high-fluence implantation, the surface of the film is completely covered by a layer of oxygen-containing groups. This phenomenon plays an importance role in the reduction of the adhesive friction between an Al2O3 ball and the nanocrystalline diamond film. |
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