Mechanical and tribological properties of diamond-like carbon films prepared on steel by ECR-CVD process |
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| Affiliation: | 1. Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, and School of Physics & Opto-electronic Technology, Dalian University of Technology, Dalian 116024, China;2. Science and Technology on Reliability and Environmental Engineering Laboratory, Beijing Institute of Spacecraft Environmental Engineering, Beijing 100094, China;1. Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore;2. Institute of Materials Research and Engineering (IMRE), A*STAR (Agency for Science, Technology, and Research), 3 Research Link, Singapore 117602, Singapore;1. Malaviya National Institute of Technology Jaipur, JLN Marg, Jaipur 302017, Rajasthan, India;2. Department of Physics, The LNM Institute of Information Technology, Jamdoli, Jaipur, India;3. CSNSM, IN2P3-CNRS, Batiment 108, F-91405 Orsay, France |
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| Abstract: | Diamond-like carbon (DLC) films were prepared on AISI 440C steel substrates at room temperature by the electron cyclotron resonance chemical vapor deposition (ECR-CVD) process in C2H2/Ar plasma under different conditions. In order to prevent the inter-diffusion of carbon and improve the adhesion strength of DLC films, functionally gradient Ti/TiN/TiCN/TiC supporting underlayers were deposited on the steel substrates in advance. Using the designed interfacial transition layers, relatively thick DLC films (1–2 μm) were successfully prepared on the steel substrates without delamination. By optimizing the deposition parameters, DLC films with hardness up to 28 GPa and friction coefficients lower than 0.15 against the 100Cr6 steel ball were obtained. In addition, the specific wear rates of the films were found to be extremely low (∼10−17 m3/Nm). The friction-induced graphitization mechanism of DLC was confirmed by micro-Raman analysis. |
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