Analysis of diamond nucleation on molybdenum by biased hot filament chemical vapor deposition |
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| Affiliation: | 1. Department of Applied Physics, Chongqing University, Chonqging 400044, PR China;2. Departamento de Fisica Aplicada i Optica, Universitat de Barcelona, Av. Diagonal 647, E-08028 Barcelona, Spain;1. Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-sen University, Kaohsiung, 804, Taiwan;2. Department of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan, 710, Taiwan;1. Studie Centrum voor Kerneenergie - Centre d’Étude de l’énergie Nucléaire (SCK?CEN), Nuclear Materials Science Institute, Boeretang 200, B2400, Mol, Belgium;2. VTT Technical Research Centre of Finland, P.O.Box 1000, FIN-02044 VTT, Finland;3. CCFE, Culham Science Centre, Abingdon, Oxon, OX14 3DB, United Kingdom;4. Department of Physics, University of Helsinki, P.O. Box 43, FI–00014 Helsinki, Finland;1. Department of Mechanical Engineering, University of Guilan, P.O. Box 3756, Rasht, Iran;2. Young Researchers and Elite Club, Langarud Branch, Islamic Azad University, Langarud, Guilan, Iran;1. Programa Institucional de Fomento a la Investigación, Desarrollo e Innovación, Universidad Tecnológica Metropolitana, Ignacio Valdivieso, 2409, San Joaquín, Santiago, 8940577, Chile;2. Centro Integrativo de Biología y Química Aplicada (CIBQA), Universidad Bernardo O''Higgins, General Gana 1702, Santiago, 8370854, Chile;1. Department of Mechatronics Engineering, D201, Engineering Building 4, Jeju National University, Jeju, South Korea;2. College of Engineering, Dankook University, South Korea |
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| Abstract: | The nucleation and initial growth of diamond on molybdenum using biased hot filament chemical vapor deposition were investigated by scanning electron microscopy, Raman spectroscopy and adhesion force tests. The studies showed that the negative biased pre-treatment greatly enhanced the nucleation density and adhesion force of diamond films on molybdenum. The experimental evidence was confirmed that there is large stress near the interface between the diamond and the Mo substrate, which were originated from the disordered graphite phases and molybdenum carbide near the interface. This may play an important role during nucleation stage. However, larger stress can cause the degradation of the adhesion force of diamond films on Mo substrate. However, the adhesion force was enhanced with increasing bias voltage. The theoretical relationship between the adhesion force and the bias voltage is given by theoretical calculation. |
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