| 旋转双光楔在激光微孔加工中的应用 |
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| 引用本文： | 潘涌,姜兆华,张同兴,张丽娟,王健超,张伟. 旋转双光楔在激光微孔加工中的应用[J]. 应用激光, 2009, 29(6): 515-517 |
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| 作者姓名： | 潘涌 姜兆华 张同兴 张丽娟 王健超 张伟 |
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| 作者单位： | 1. 上海市激光技术研究所,上海,200233;上海市激光束精细加工重点实验室,上海,200233
2. 上海市激光技术研究所,上海,200233 |
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| 基金项目： | 上海市科学技术委员会应用技术开发项目 |
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| 摘 要： | 采用波长为355nm的高重复频率、纳秒脉冲全固态紫外激光器作为光源,对材料进行精确螺旋状钻孔.激光加工光束偏离小孔中心由偏置双光楔产生,并由高速电机带动旋转,使得小孔边缘的热效应降到最低;小孔的中心位置由高精度二维工作台位移决定,可以应用于列阵孔的激光加工中.
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| 关 键 词： | 旋转双光楔 高重复频率全固态激光器 激光加工 列阵孔 |
| 收稿时间： | 2009-09-16 |
Application of Rotating Pairs of Optical Wedge in the Laser Micro-holes Processing |
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| Pan Yong,Jiang Zhaohua,Zhang Tongxin,Zhang Lijuan,Wang Jian Chao,Zhang Wei. Application of Rotating Pairs of Optical Wedge in the Laser Micro-holes Processing[J]. Applied Laser, 2009, 29(6): 515-517 |
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| Authors: | Pan Yong Jiang Zhaohua Zhang Tongxin Zhang Lijuan Wang Jian Chao Zhang Wei |
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| Abstract: | Using a wavelength of 355nm high-repetition rate,short pulse all-solid-state laser as a light source,to accurate spiral drilling micro-holes in some materials. By using biased pairs of optical wedge rotated by the high-speed motor,laser processing beam deviate from the hole center,making least thermal effects around the hole edge. This instrument can be applied to holes array of laser processing,with the workpieces carrying by high-precision two-dimensional moving table. |
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| Keywords: | rotating pairs of optical wedge high repetition rate solid-state lasers laser processing holes array |
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